JPH0431583Y2 - - Google Patents
Info
- Publication number
- JPH0431583Y2 JPH0431583Y2 JP13727882U JP13727882U JPH0431583Y2 JP H0431583 Y2 JPH0431583 Y2 JP H0431583Y2 JP 13727882 U JP13727882 U JP 13727882U JP 13727882 U JP13727882 U JP 13727882U JP H0431583 Y2 JPH0431583 Y2 JP H0431583Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- cylindrical body
- exchange rod
- sample exchange
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000003302 ferromagnetic material Substances 0.000 claims description 6
- 230000005294 ferromagnetic effect Effects 0.000 description 6
- 230000005291 magnetic effect Effects 0.000 description 5
- 238000011109 contamination Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13727882U JPS5941749U (ja) | 1982-09-09 | 1982-09-09 | 真空機器における試料交換棒移動機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13727882U JPS5941749U (ja) | 1982-09-09 | 1982-09-09 | 真空機器における試料交換棒移動機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5941749U JPS5941749U (ja) | 1984-03-17 |
| JPH0431583Y2 true JPH0431583Y2 (en]) | 1992-07-29 |
Family
ID=30308394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13727882U Granted JPS5941749U (ja) | 1982-09-09 | 1982-09-09 | 真空機器における試料交換棒移動機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5941749U (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0355238Y2 (en]) * | 1985-10-02 | 1991-12-09 | ||
| JP3553318B2 (ja) * | 1997-05-20 | 2004-08-11 | 日本電子株式会社 | ホルダ保持装置 |
-
1982
- 1982-09-09 JP JP13727882U patent/JPS5941749U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5941749U (ja) | 1984-03-17 |
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